연구동향 분석

In-situ Synchrotron Radiation Photoemission Spectroscopy Study of Property Variation of Ta₂O5 Film during the Atomic Layer Deposition

Seung Youb Lee Cheolho Jeon Seok Hwan Kim Jouhahn Lee Hyung Joong Yun Soo Jeong Park Ki-Seok An Chong-Yun Park 2014년

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