연구 논문 : 전기화학적 마이크로머시닝 기술을 이용한 균일한 니오븀 표면 에칭 연구

논문상세정보
' 연구 논문 : 전기화학적 마이크로머시닝 기술을 이용한 균일한 니오븀 표면 에칭 연구' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • electrochemicaletching
  • epoxy
  • micro-contactprinting
  • nbetching
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
86 0

0.0%

' 연구 논문 : 전기화학적 마이크로머시닝 기술을 이용한 균일한 니오븀 표면 에칭 연구' 의 참고문헌

  • Silicon micromachining using a high-density plasma source
    S. A. McAuley J. Phys. D Appl. Phys 34 : 2769 ~ [2001]
  • Shape changes during through-mask electrochemical micromachining of thin metal films
    A. C. West J. Electrochem. Soc 139 : 499 ~ [1992]
  • Recent advances in the study of electrochemical micromachining
    M. Datta J. Eng. Ind. Trans. ASME 118 : 29 ~ [1996]
  • PDMS를 이용한 균일한 알루미늄 표면 패터닝 연구
    박가연 공업화학 23 (5) : 501 ~ 504 [2012]
  • Miniaturized total analysis systems for biological analysis
    S. C. Jakeway Anal. Bioanal. Chem 366 : 525 ~ [2000]
  • Micromachined polysilicon resonating xylophone bar magnetometer
    D. K. Wickenden Acta Astronaut 52 : 142 ~ [2003]
  • Microelectrode array fabrication by electrical discharge machining and chemical etching
    T. A. Fofonoff IEEE T. Bio-Med. Eng 51 : 890 ~ [2004]
  • Micro and nano machining by electro-physical and chemical processes
    K. P. Rajurkar CIRP Ann. -Manuf. Techn 55 : 643 ~ [2006]
  • Micro Electrochemical machining of 3D micro structure using dilute sulfuric acid
    B. H. Kim CIRP Ann. -Manuf. Techn 54 : 191 ~ [2005]
  • Investigation of nanoscale electro machining (nano-EM) in dielectric oil
    A. P. Malshe CIRP Ann. -Manuf. Techn 54 : 175 ~ [2005]
  • Improved electrical properties of silicon-incorporated anodic niobium oxide formed on porous Nb-Si substrate
    M. T. Tanvir Appl. Surf. Sci 255 : 8383 ~ [2009]
  • Fundamental aspects and applications of electrochemical microfabrication
    M. Datta Electrochem. Acta 45 : 2535 ~ [2000]
  • Fabrication of an array of precision nozzles by through-mask electrochemical micromachining
    M. Datta J. Electrochem. Soc 142 : 3801 ~ [1995]
  • Excimer laser micro machining of inorganic dielectrics
    J. Ihlemann Appl. Surf. Sci 106 : 282 ~ [1996]
  • Electrochemical surface enlargement of a niobium foil for electrolytic capacitor applications
    J. E. Yoo Electrochem. Commun 13 : 298 ~ [2011]
  • Electrochemical micromachining of titanium using laser oxide film lithography : excimer laser irradiation of anodic oxide
    P. F. Chauvy Appl. Surf. Sci 211 : 113 ~ [2003]
  • Electrochemical micromachining of titanium through a laser patterned oxide film
    P. F. Chauvy Electrochem. Solid St 4 : C31 ~ [2001]
  • Electrochemical micromachining of titanium surfaces for biomedical applications
    X. Lu J. Mater. Process. Tech 169 : 173 ~ [2005]
  • Electrochemical micromachining of stainless steel by ultrashort voltage pulses
    L. Cagnon Z. Phys. Chem 217 : 299 ~ [2003]
  • Electrochemical micromachining of p-type silicon
    P. Allongue J. Phys. Chem. B 108 : 14434 ~ [2004]
  • Electrochemical micromachining of microstructures of micro hole and dimple array
    D. Zhu CIRP Ann. -Manuf. Techn 58 : 177 ~ [2009]
  • Electrochemical micromachining : An environmentally friendly, high speed processing technology
    M. Datta Electrochim. Acta 42 : 3007 ~ [1997]
  • Electrochemical micromachining
    R. Shuster Science 289 : 98 ~ [2000]
  • Electrochemical machining with ultrashort voltage pulses: modelling of charging dynamics and feature profile evolution
    J. A. Kenney Nanotechnology 16 : S309 ~ [2005]
  • Electrochemical etching of a niobium foil in methanolic HF for electrolytic capacitor
    K. Kim Mater. Chem. Phys 141 : 810 ~ [2013]
  • Electrochemical dissolution of stainless steels in flow channel cells with and without photoresist masks
    E. Rosset J. Appl. Electrochem 20 : 69 ~ [1990]
  • Comparative evaluation of drying techniques for surface micromachining
    C. Kim Sensor. Actuat. A-Phys 64 : 17 ~ [1998]
  • Chemical machining
    Y. Mori J. Mater. Process Tech 4 : 225 ~ [1993]
  • Application of chemical and electrochemical micromachining in the electronics industry
    M. Datta J. Electrochem. Soc 136 : 285 ~ [1989]
  • Advancement in electrochemical micro-machining
    B. Bhattacharyya Int. J. Mach. Tool. Manu 44 : 1577 ~ [2004]
  • 3-D integration of RF circuits using Si micromachining
    L. P. B. Katehi IEEE Microw. Mag 2 : 30 ~ [2001]