루테늄 전극위에 증착된 PZT 박막의 전기적 및 강유전 특성

논문상세정보
' 루테늄 전극위에 증착된 PZT 박막의 전기적 및 강유전 특성' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • 전기공학, 전자공학
  • leakage current
  • perovskite
  • pzt
  • ruthenium
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
1,639 0

0.0%

' 루테늄 전극위에 증착된 PZT 박막의 전기적 및 강유전 특성' 의 참고문헌

  • Strontium ruthenium oxide deposition in supercritical carbon dioxide using a closed reactor system
    Kyubong Jung The Journal of Supercritical Fluids 79 : 244 ~ 250 [2013]
  • Preparation and characterization of unimorph actuators based on piezoelectric Pb(Zr0.52Ti0.48)O3 materials
    Yi Yin Sensors and Actuators A:Physical 171 (2) : 332 ~ 339 [2011]
  • Leakage current conduction in IrO2/PZT/Pt structures
    E Bouyssou Journal of Physics : Conference Series 10 : 317 ~ 320 [2005]
  • Growth of Ru/RuO2 layers with atomic vapor deposition on plain wafers and into trench structures
    C. Manke Microelectronic Engineering 83 : 2277 ~ 2281 [2006]
  • Effect of bottom electrode and resistive layer on the dielectric and ferroelectric properties of sol–gel derived BiFeO3thin films
    A. Huang Journal of Alloys and Compounds 39 (1) : 219 ~ 225 [2013]
  • Bottom electrode crystallization of PZT thin films for ferroelectric capacitors
    A. I. Mardare Journal of the European Ceramic Society 25 : 735 ~ 741 [2005]
  • Advances in the growth and characterization of magnetic, ferroelectric, and multiferroic oxide thin films
    L.W. Martin Materials Science and Engineering: R: Reports 68 (4–6) : 89 ~ 133 [2010]