집속이온빔(Focused Ion Beam)에 의한 단결정 다이아몬드 공구의 마이크로/나노스케일 절삭공구 형상 제작

논문상세정보
' 집속이온빔(Focused Ion Beam)에 의한 단결정 다이아몬드 공구의 마이크로/나노스케일 절삭공구 형상 제작' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • 정밀기계
  • cuttingedgewidth(절삭날폭)
  • diamondtoolgeometry(다이아몬드공구형상)
  • focusedionbeam(집속이온빔)
  • highaspectratio(고세장비)
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
304 0

0.0%

' 집속이온빔(Focused Ion Beam)에 의한 단결정 다이아몬드 공구의 마이크로/나노스케일 절삭공구 형상 제작' 의 참고문헌

  • The Physics of Micro/Nano-fabrication
    Ivor, I. Plenum Press [1992]
  • The Effects of Fib Scan Method on Au Etching Profile
    Park, J. J. Proc. of KSPE Spring Conference : 367 ~ 368 [2008]
  • Recent Developments in Nanofabrication using Focused Ion Beams
    Tseng, A. A. Small 1 (10) : 924 ~ 939 [2005]
  • Recent Developments in Micromilling using Focused Ion Beam Technology
    Tseng, A. A. J. Micromech. Microeng 14 (4) : R15 ~ R34 [2004]
  • New Characterization Method of Ion Current-Density Profile Based on Damage Distribution of Ga+ Focused-Ion Beam Implantation in GaAs
    Ben Assaya, G. J. Vac. Sci. Technol. B 11 (6) : 2420 ~ 2426 [1993]
  • Nanoscale Effects in Focused Ion Beam Processing
    Frey, L. Appl. Phys. A 76 (7) : 1017 ~ 1023 [2003]
  • Microorigami : Fabrication of Small, Three-Dimensional, Metallic Structures
    Brittain, S. T. J. Phys. Chem. B 105 (2) : 347 ~ 350 [2001]
  • Mathematical Modeling of Focused Ion Beam Microfabrication
    Nassar, R. J. Vac. Sci. Tehcnol. B 16 (1) : 109 ~ 115 [1997]
  • Level Set Approach for the Simulation of Focused Ion Beam Processing on the Micro/Nano Scale
    Kim, H. B. Nanotechnology 18 (26) : 265307 ~ 265313 [2007]
  • Ion Projection Lithography: Progress of European MEDEA &International Program
    Kaesmaier, R. Microelectron. Eng. 53 (1) : 37 ~ 45 [2000]
  • Handbook of Charged Particle Optics
    Orloff, J. CRC Press : 129 ~ 160 [2009]
  • Full Three-Dimensional Simulation of Focused Ion Beam Micro/Nanofabrication
    Kim, H. B. Nano-technolgoy 18 (24) : 245303 ~ 245311 [2007]
  • Focused Ion Beam Sculpting Curved Shape Cavities in Crystalline and Amorphous Targets
    Adams, D. P. J. Vac. Sci. Technol. B 24 (4) : 1766 ~ 1775 [2006]
  • Focused Ion Beam Milling: Depth Control for Three-Dimensional Micro Fabrication
    Vasile, M. J. J. Vac. Sci. Technol. B 15 (6) : 2350 ~ 2354 [1997]
  • Fabrication of Three-Dimensional Microstructures by Two Dimensional Slice by Slice Approaching via Focused Ion Beam Milling
    Fu, Y. J. Vac. Sci. Tehcnol. B 22 (4) : 1672 ~ 1678 [2004]
  • Design and Fabrication of Topologically Complex, Three-Dimensional Micro-Structures
    Jackman, R. J. Science 280 : 2089 ~ 2091 [1998]
  • Computer Simulation of Current Density Profiles in Focused Ion Beams
    Ward, J. W. J. Vac. Sci. Technol. B 5 (1) : 169 ~ 1743 [2007]
  • Beam-size Measurement in Focused Ion Beam Systems
    Harriott, L. R. J. Vac. Sci. Technol. A 8 (2) : 899 ~ 901 [1990]
  • Accurate Focused Ion Beam Sculpting of Silicon using a Variable Pixel Dwell Time Approach
    Adams, D. P. J. Vac, Sci. Technol. B 24 (2) : 836 ~ 843 [2006]
  • A review of Focused Ion Beam Technology and its Applications in Transmission Electron Microscopy
    Sugiyama, M. J. Elec. Microscopy 53 (5) : 527 ~ 536 [2004]
  • A Review of Focused Ion Beam Applications in Microsystem Technology
    Reyntjens, S. J. Micromech. Microeng. 11 (4) : 287 ~ 300 [2001]