연구동향 분석

반도체 플라즈마 증착공정장비에서의 효율적인 장비 운영 알고리즘에 관한 연구

박유진(You-Jin Park) 황하란(HaRan Hwang) 2013년

논문상세정보
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' 반도체 플라즈마 증착공정장비에서의 효율적인 장비 운영 알고리즘에 관한 연구' 의 주제별 논문영향력
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' 반도체 플라즈마 증착공정장비에서의 효율적인 장비 운영 알고리즘에 관한 연구' 의 참고문헌

  • 클러스터 툴의 예방유지보수 스케줄링 모형
    산업공학(IE interfaces) 25 (1) : 127 ~ 133 [2012]
  • 반도체 클러스터 장비에서 웨이퍼 이동지연을 허용하는 스케줄링 방법
    한국생산관리학회지 22 (4) : 417 ~ 430 [2011]
  • Timed Petri Nets in Modeling and Analysis of Cluster Tools
    IEEE Transaction on Semiconductor Manufacturing 17 : 562 ~ 575 [2001]
  • Sequencing and Scheduling in Robotic Cells : Recent Developments
    Journal of Scheduling 8 : 387 ~ 426 [2005]
  • Scheduling Singlearmed Cluster Tools with Reentrant Wafer Flows
    IEEE Transaction on Semiconductor Manufacturing 19 : 226 ~ 240 [2006]
  • Scheduling Analysis of Time-constrained Dual-armed Cluster Tools
    IEEE Transaction on Semiconductor Manufacturing 16 : 521 ~ 534 [2003]
  • Schedulability Analysis of Time-constrained Cluster Tools with Bounded Time Variation by an Extended Petri Net
    IEEE Transaction on Semiconductor Manufacturing 5 : 490 ~ 503 [2008]
  • Robotic Flowshop Scheduling is Strongly NP-complete, In CWI Tract 122
    The Netherlands : 277 ~ 286 [1997]
  • Real-time Deadlockfree Scheduling for Semiconductor Track Systems Based on Colored Timed Petri Nets
    OR Spectrum 29 : 421 ~ 443 [2007]
  • Modeling and Performance Analysis of Cluster Tools Using Petri Nets
    IEEE Transaction on Semiconductor manufacturing 11 : 394 ~ 403 [1998]
  • Modeling and Optimization of Industrial Manufacturing Processes Subject to Nowait Constraints
    International Journal of Production Research 37 : 2585 ~ 2607 [1999]
  • Modeling and Optimization of Cluster Tools in Semiconductor Manufacturing
    University of Wuerzburg [2004]
  • Job Shop Scheduling Techniques in Semiconductor Manufacturing
    The International Journal of Advanced Manufacturing Technology 27 : 1163 ~ 1169 [2006]
  • Genetic Algorithms in Search, Optimization, and Machine Learning
    Addison-Wesley [1989]
  • Complex job shop scheduling: Formulations, algorithms and a healthcare application
    University of Fribourg [2008]
  • 450mm Program
    SEMI Standard Workshop [2009]