A Study on the Safe Hydrogen Exhaust Method in the Semiconductor Industry

논문상세정보
    • 저자 서성민 송용원
    • 제어번호 108097455
    • 학술지명 아시아태평양융합연구교류논문지
    • 권호사항 Vol. 7 No. 6 [ 2021 ]
    • 발행처 사단법인 미래융합기술연구학회
    • 자료유형 학술저널
    • 수록면 1-10
    • 언어 English
    • 출판년도 2021
    • 등재정보 KCI등재
    • 판매처
    유사주제 논문( 0)

' A Study on the Safe Hydrogen Exhaust Method in the Semiconductor Industry' 의 참고문헌

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  • Development of Hydrogen Exhaust Safety System using TRIZ & Design of Experiment
    S. M Seo [2020]
  • Analysis of Technology Evolution Trends for Predicting Future Technologies
    송용원 [2020]
  • Analysis of Technological Evolution for TV Displays Using S-Curves
    박찬우 [2020]
  • A Review of TRIZ and Its Benefits and Challenges in Practice
  • A Brief History of TRIZ
    V. Souchkov [2015]