연구동향 분석

RF 마그네트론 스퍼터링법으로 투명 PI 기판에 증착된 ITO 박막의 특성에 미치 는 열처리의 영향

김해찬 조현 김진곤 2020년

논문상세정보
    • 저자 김해찬 조현 김진곤
    • 제어번호 106594050
    • 학술지명 한국결정성장학회지
    • 권호사항 Vol. 30 No. 1 [ 2020 ]
    • 발행처 한국결정성장학회
    • 발행처 URL http://www.kacg.net
    • 자료유형 학술저널
    • 수록면 12-16
    • 언어 Korean
    • 출판년도 2020
    • 등재정보 KCI등재
    • 소장기관 계명대학교 동산도서관 서울대학교 중앙도서관 영남대학교 과학도서관
    • 판매처
    유사주제 논문( 0)
인용/피인용

' RF 마그네트론 스퍼터링법으로 투명 PI 기판에 증착된 ITO 박막의 특성에 미치 는 열처리의 영향' 의 참고문헌

  • XPS study of ion beam modified polyimide films
  • Transparent electrodes based on metal and metal oxide stacked layers grown at room temperature on polymer substrate
    C. Guillen [2010]
  • Transparent conductors-A status review
  • Transparent conducting oxides for electrode applications in light emitting and absorbing devices
    H. Liu [2010]
  • Tin doped indium oxide thin films : Electrical properties
  • Thin film polyimide/indium tin oxide composites for photovoltaic applications
  • Role of annealing temperature on microstructural and electro-optical properties of ITO films produced by sputtering
    M. Gulen [2013]
  • Present status of transparent conduction oxide thin-film development for Indium-Tin-Oxide(ITO)substitutes
    T. Minami [2008]
  • Preparation of SnO2 nanolayer on flexible polyimide substrates via direct ion exchange and in situ oxidation process
    G. Cui [2011]
  • Influence of thermal annealing on electrical and optical properties of indium tin oxide thin films
    Z. Xu [2014]
  • Indium tin oxide thin films for organic light-emitting devices
    H. Kim [1999]
  • ITO deposited by pyrosol for photovoltaic applications
  • High rate deposition of tin-doped indium oxide films by reactive magnetron sputtering with unipolar pulsing and plasma emission feedback systems
    S. Ohno [2006]
  • Fabrication of highly reflective and conductive double-surface-silvered layers embedded on polymeric films through all-wet process at room temperature
    S. Yang [2009]
  • Etchingless micro fabrication of a thick metal oxide film on a flexible polymer substrate
  • Electrical and optical characteristics of ITO films by pulsed laser deposition using a 10 wt% SnO2-doped IN2O3ceramic target
    S. H. Kim [2005]
  • Effects of heat treatment on properties of ITO prepared by rf magnetron sputtering
    Y. Hu [2004]
  • Effect of annealing time on the structural, optical and electrical characteristics of DC sputtered ITO thin films
    S. D. Senol [2014]
  • A study on electric properties for pulse laser annealing of ITO film after wet etching
    C. J. Lee [2012]