Study on the Structural and Mechanical Characteristics of ITO Films Deposited by Pulsed DC Magnetron Sputtering

논문상세정보
' Study on the Structural and Mechanical Characteristics of ITO Films Deposited by Pulsed DC Magnetron Sputtering' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • 응용 물리
  • ITO (indium tin oxide)
  • Internal stress
  • Negative clearance
  • SHJ solar cell
  • Vibration control boring bar
  • Working pressure
  • pulsed dc magnetron sputtering
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
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