연구동향 분석

Thickness-dependent Electrical, Structural, and Optical Properties of ALD-grown ZnO Films

Choi, Yong-June Kang, Kyung-Mun Park, Hyung-Ho 2014년

논문상세정보
인용/피인용
' Thickness-dependent Electrical, Structural, and Optical Properties of ALD-grown ZnO Films' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • atomic layer deposition
  • resistivity
  • thickness
  • transmittance
  • zinc oxide
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
406 0

0.0%

' Thickness-dependent Electrical, Structural, and Optical Properties of ALD-grown ZnO Films' 의 참고문헌

  • Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering
    P. F. Carcia Appl. Phys. Lett. 82 (7) : 1117 ~ [2003]
  • Transparent Conducting Oxides for Photovoltaics
    E. Fortynato MRS Bull. 32 (03) : 242 ~ [2007]
  • Surface Oxidation Effect During high Temperature Vacuum Annealing on the Electrical Conductivity of ZnO thin Films Deposited by ALD
    김진용 마이크로전자 및 패키징학회지 19 (2) : 73 ~ 78 [2012]
  • Optical properties of epitaxially grown zinc oxide films on sapphire by pulsed laser deposition
    X. W. Sun J. Appl. Phys. 86 : 408 ~ [1999]
  • Optical and structural investigation of ZnO thin films prepared by chemical vapor deposition (CVD)
    M. Purica Thin Solid Films 403 : 485 ~ [2002]
  • New figure of merit for transparent conductors
    G. Haacke J. Appl. Phys. 47 : 4086 ~ [1976]
  • Low-temperature epitaxy of ZnO films on (001) and silica by reactive e-beam evaporation
    H. Z. Wu J. Cryst. Growth. 217 (1) : 131 ~ [2000]
  • Improved Performance of Organic Light-Emitting Diodes Fabricated on Al-Doped ZnO Anodes Incorporating a Homogeneous Al-Doped ZnO Buffer Layer Grown by Atomic Layer Deposition
    Y.-J. Choi ACS APPLIED MATERIALS INTERFACES 5 (9) : 3650 ~ 3655 [2013]
  • ITO/Glass 기판위에 PFO-poss 유기 발광층을 가지는 고분자 발광다이오드의 제작
    유재혁 마이크로전자 및 패키징학회지 13 (4) : 51 ~ 56 [2006]
  • Flexible organic electronic devices: Materials, process and applications
    Logothetidis, S. Mater. Sci. Eng. B 152 (1) : 96 ~ [2008]
  • Fabrication and Characterization of Direct-Patternable ZnO Films Containing Pt Nanoparticles
    Y.-J. Choi Japanese Journal of Applied Physics 48 : 035504-1 ~ 035504-4 [2009]
  • Electrical and optical properties of ZnO transparent conducting films by the sol-gel method
    J.-H. Lee Thin Solid Films 247 (1) : 119 ~ [2003]
  • Compositional Study of Surface, Film, and Interface of Photoresist-Free Patternable SnO2 Thin Film on Si Substrate Prepared by Photochemical Metal-Organic Deposition
    최용준 마이크로전자 및 패키징학회지 21 (1) : 13 ~ 17 [2014]
  • A simple approach to the fabrication of fluorine-doped zinc oxide thin films by atomic layer deposition at low temperatures and an investigation into the growth mode
    Y.-J. Choi JOURNAL OF MATERIALS CHEMISTRY C 2 (1) : 98 ~ 108 [2014]