공진형 MEMS 가속도계의 음향가진 반응특성 연구

논문상세정보
' 공진형 MEMS 가속도계의 음향가진 반응특성 연구' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • 전기공학, 전자공학
  • accelerometer
  • acoustic wave
  • inertial measurement unit
  • mems
  • vibration
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
1,839 0

0.0%

' 공진형 MEMS 가속도계의 음향가진 반응특성 연구' 의 참고문헌

  • The Silicon Oscillating Accelerometer
    IRalph E. Hopkins AIAA Missile Sciences Conference : 44 ~ 51 [2000]
  • High-Performance, Low Cost Inertial MEMS : a Market in Motion
    IMichael Perlmutter IEEE Position Location and Navigation Symposium (PLANS) : 225 ~ 229 [2012]
  • Error Sources in In-Plane Silicon Tuning-Fork MEMS Gyroscopes
    IMarc S. Weinberg JMEMS 15 : 479 ~ 491 [2006]
  • Design, Fabrication and Static test of a Resonant Accelerometer
    IS. Kim ASME Symposium on Microelectromechanical Systems : 21 ~ 26 [1997]
  • An introduction to inertial navigation : 5 ~ 10
  • A Surface-Bulk-Micromachined Electromagnetic Gyroscope Operating at Atmospheric Pressure
    ISeong-Hyok Kim Jpn. J. Applied Phys 39 : 7130 ~ 7133 [2000]
  • A Resonant Accelerometer With Two-Stage Microleverage Mechanisms Fabricated by SOI-MEMS Technology
    ISusan X. P. Su IEEE SENSORS Journal 5 (6) : 1214 ~ 1223 [2005]
  • A Miniature, Gun-Hard MEMS IMU for Guided Projectiles, Rockets and Missile
    I. W. Scaysbrook IEEE Position, Location and Navigation Symposium (PLANS) : 26 ~ 34 [2004]