연구동향 분석

반도체 작업환경 내 부산물로 생성되는 실리카 입자의 크기, 형상 및 결정 구조

최광민 ( Kwang Min Choi ) 여진희 ( Jin Hee Yeo ) 정명구 ( Myung Koo Jung ) 김관식 ( Kwan Sick Kim ) 조수헌 ( Soo Hun Cho ) 2015년

논문상세정보
인용/피인용
' 반도체 작업환경 내 부산물로 생성되는 실리카 입자의 크기, 형상 및 결정 구조' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • 위생학, 공공의학
  • by-products
  • semiconductor
  • silica particles
  • wafer fabrication process
  • work environment
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
305 0

0.0%

' 반도체 작업환경 내 부산물로 생성되는 실리카 입자의 크기, 형상 및 결정 구조' 의 참고문헌

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