연구동향 분석

상온에서 성막한 고감도의 Al1-xScxN 박막의 압력 감지 특성

석혜원 ( Hye Won Seok ) 김세기 ( Sei Ki Kim ) 강양구 ( Yang Koo Kang ) 이영진(Young-Jin Lee) 홍연우 ( Yeon Woo Hong ) 주병권 ( Byeong Kwon Ju ) 2014년

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논문상세정보
인용/피인용
' 상온에서 성막한 고감도의 Al1-xScxN 박막의 압력 감지 특성' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • 전자공학
  • alnthinfilm
  • piezoelectric
  • pressure sensor
  • rfreactivesputtering
  • roomtemperaturedeposition
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
2,423 0

0.0%

' 상온에서 성막한 고감도의 Al1-xScxN 박막의 압력 감지 특성' 의 참고문헌

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