RF 유도결합 열 플라즈마를 이용한 암모니아와 질소분위기에서 고순도 AlN 나노 분말의 합성

' RF 유도결합 열 플라즈마를 이용한 암모니아와 질소분위기에서 고순도 AlN 나노 분말의 합성' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • 요업 및 동계공업
  • aluminum nitride
  • ammonia gas
  • nano powder
  • nitrogengas
  • rfinductionthermalplasma
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
187 0

0.0%

' RF 유도결합 열 플라즈마를 이용한 암모니아와 질소분위기에서 고순도 AlN 나노 분말의 합성' 의 참고문헌

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