연구동향 분석

High performace MoS2 transistor using high-k dielectrics grown by atomic layer deposition with various oxidants

우황제 2020년

논문상세정보
인용/피인용
' High performace MoS2 transistor using high-k dielectrics grown by atomic layer deposition with various oxidants' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • 2D TMDCs
  • ALD on 2D
  • MoS2 field effect transistor
  • MoS2 트렌지스터
  • acetic acid
  • al2o3
  • atomic layer deposition
  • contact resistance
  • dielectric constant
  • doping
  • film uniformity
  • ipa
  • mos2
  • precursor
  • 도핑
  • 박막 균일도
  • 아세트산
  • 원자층 증착법
  • 유전상수
  • 이차원 전이금속 다이칼고게나이드
  • 전구체
  • 접촉 저항
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
1,164 0

0.0%

' High performace MoS2 transistor using high-k dielectrics grown by atomic layer deposition with various oxidants' 의 참고문헌

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