연구동향 분석
박사

Process diagnosis of semiconductor and display manufacturing using Raman spectroscopy with multi-array laser : thin film (CVD process) growth mechanism & monitoring cleaning solution and CMP slurry solution monitoring

최은화 2020년

논문상세정보
인용/피인용
' Process diagnosis of semiconductor and display manufacturing using Raman spectroscopy with multi-array laser : thin film (CVD process) growth mechanism & monitoring cleaning solution and CMP slurry solution monitoring' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • CMP slurry
  • Raman Spectroscopy
  • cleaningsolution
  • real-time monitoring
  • thin film
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
93 0

0.0%

' Process diagnosis of semiconductor and display manufacturing using Raman spectroscopy with multi-array laser : thin film (CVD process) growth mechanism & monitoring cleaning solution and CMP slurry solution monitoring' 의 참고문헌

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