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박막공정용 증착원료물질의 진공에서의 열물성 측정 = Thermophysical property measurements under vacuum of source materials used in thin film vapor deposition

심섭 2019년

논문상세정보
인용/피인용
' 박막공정용 증착원료물질의 진공에서의 열물성 측정 = Thermophysical property measurements under vacuum of source materials used in thin film vapor deposition' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • Organic small molecule
  • TEMAHf
  • alq3
  • deposition-source materials
  • higk-k dielectrics
  • long-term thermal stability
  • npb
  • organic light-emitting diodes metal-organic precursor
  • phase transition
  • thermophysical property
  • thin film deposition
  • vacuum
  • vapor pressure
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
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' 박막공정용 증착원료물질의 진공에서의 열물성 측정 = Thermophysical property measurements under vacuum of source materials used in thin film vapor deposition' 의 참고문헌

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