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Epitaxial growth of crystalline beryllium oxide thin film by atomic layer deposition, and its applications to high-power electronic devices

이승민 2019년

논문상세정보
인용/피인용
' Epitaxial growth of crystalline beryllium oxide thin film by atomic layer deposition, and its applications to high-power electronic devices' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • 4h-sic
  • Atomic layer deposition
  • Band alignment
  • Beryllium oxide
  • Domain-Matching Epitaxy
  • Gate dielectric
  • Silicon-OnInsulator
  • gan
  • 게이트 절연체
  • 도메인-정합 에피택시
  • 밴드 정렬
  • 산화베릴륨
  • 실리콘-온-인슐레이터
  • 원자층증착
  • 질화 갈륨
  • 탄화규소
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
293 0

0.0%

' Epitaxial growth of crystalline beryllium oxide thin film by atomic layer deposition, and its applications to high-power electronic devices' 의 참고문헌

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