연구동향 분석
박사

Reduction of Leakage Currents in High-k Dielectrics by Controlling Oxygen Vacancy = 산소 결함 조절을 통한 고유전율 박막의 누설 전류 개선 연구

Bo-Eun Park 2019년

논문상세정보
인용/피인용
' Reduction of Leakage Currents in High-k Dielectrics by Controlling Oxygen Vacancy = 산소 결함 조절을 통한 고유전율 박막의 누설 전류 개선 연구' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • 응용 물리
  • Atomic layer deposition
  • Doping
  • Leakage current
  • Precursor
  • dielectric constant
  • dram
  • hfo2
  • high-k
  • oxygen vacancy
  • zro2
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
5,037 0

0.0%

' Reduction of Leakage Currents in High-k Dielectrics by Controlling Oxygen Vacancy = 산소 결함 조절을 통한 고유전율 박막의 누설 전류 개선 연구' 의 참고문헌

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