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SiC super junction MOSFET의 설계 제작에 있어서 트렌치 및 이온주입 공정의 최적화 방안에 대한 연구 = A study on the optimization of trenchetch and ion implantation designing SiC super junction MOSFET

금종민 2016년

논문상세정보
인용/피인용
' SiC super junction MOSFET의 설계 제작에 있어서 트렌치 및 이온주입 공정의 최적화 방안에 대한 연구 = A study on the optimization of trenchetch and ion implantation designing SiC super junction MOSFET' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • Super Junction
  • sic
  • 이온주입
  • 트렌치
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
111 0

0.0%

' SiC super junction MOSFET의 설계 제작에 있어서 트렌치 및 이온주입 공정의 최적화 방안에 대한 연구 = A study on the optimization of trenchetch and ion implantation designing SiC super junction MOSFET' 의 참고문헌

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