연구동향 분석
박사

반도체 건식식각 장치의 내구성이 향상된 실리콘과 세라믹 부재 연구 = A study of lifetime optimization of silicon and ceramic materials for semiconductor dry etcher

최왕기 2016년

논문상세정보
인용/피인용
' 반도체 건식식각 장치의 내구성이 향상된 실리콘과 세라믹 부재 연구 = A study of lifetime optimization of silicon and ceramic materials for semiconductor dry etcher' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • Crystal Orientation
  • Erosion rate
  • Single silicon
  • dryetch
  • plasma
  • 건식식각
  • 결정방향
  • 단결정실리콘
  • 식각률
  • 플라즈마
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
327 0

0.0%

' 반도체 건식식각 장치의 내구성이 향상된 실리콘과 세라믹 부재 연구 = A study of lifetime optimization of silicon and ceramic materials for semiconductor dry etcher' 의 참고문헌

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