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Development of Equivalent Circuit Model for Very High Frequency Driven Capacitively Coupled Plasmas : 초고주파 용량성 결합 플라즈마장치의 등가회로모델 개발

최명선 2015년

논문상세정보
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' Development of Equivalent Circuit Model for Very High Frequency Driven Capacitively Coupled Plasmas : 초고주파 용량성 결합 플라즈마장치의 등가회로모델 개발' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • capacitively coupled plasma
  • ccp
  • plasma
  • vhf discharge
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
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' Development of Equivalent Circuit Model for Very High Frequency Driven Capacitively Coupled Plasmas : 초고주파 용량성 결합 플라즈마장치의 등가회로모델 개발' 의 참고문헌

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