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반도체 공정용 칠러의 모델링과 COP 제어 연구 = A Study on Modeling and Effective Control for Semiconductor Process Chiller

정규식 2015년

논문상세정보
인용/피인용
' 반도체 공정용 칠러의 모델링과 COP 제어 연구 = A Study on Modeling and Effective Control for Semiconductor Process Chiller' 의 주제별 논문영향력
논문영향력 선정 방법
논문영향력 요약
주제
  • chiller
  • control
  • cop
  • evaporator
  • hot gas bypass
  • optimal
  • semiconductor
  • variable speed compressor
  • 가변 압축기
  • 냉각용량
  • 냉각효율
  • 모델링
  • 반도체
  • 반도체 공정
  • 열교환기
  • 제어
  • 최적제어
  • 칠러
동일주제 총논문수 논문피인용 총횟수 주제별 논문영향력의 평균
843 0

0.0%

' 반도체 공정용 칠러의 모델링과 COP 제어 연구 = A Study on Modeling and Effective Control for Semiconductor Process Chiller' 의 참고문헌

  • 최신 공업열역학,문운당
    노승탁 서울,pp.63-70 [1999]
  • “핫가스 바이패스를 이용한 워터쿨러의 정밀온도제어”
    최준혁 석사학위논문,부경대학교 [2010]
  • “토출가스 바이패스 개도에 따른 워터쿨러의 성능특성”
    문춘근 백승문 윤정인 정석권 최준혁 한국냉동공학학술대회 논문집, Vol.1,pp.125-128 [2009]
  • “토출가스 바 이패스제어에 의한 산업용 냉각기의 온도제어”
    문춘근 변종영 윤정인 정석권 주우진 최준혁 대한설비공학회 하계 학술발표대회 논문집,Vol.1,pp.190 [2009]
  • “전자식 팽창벨브와 HotGas Bypass를 이용한 가변 부하 대응 연구”
    남승표 신동헌 정규식 힘희준 한국정밀공학회 논문집(하), pp.1083-1084 [2010]
  • TechnicalInformation,1995,“ThermaldynamicPropertiesofDuPont Suva404A(HP62)Refrigerant”,DuPont,U.S.A..
  • Qilun Song, Gi-Yong Hong, and Keum-Shik Hong, 2010, “Adaptive control for a multi-condenser inverter heat pump system”, International Conference on Control, Automation and systems,pp.501-506.
  • NanS.P.,2011op.cit.,pp.17.
  • NanS.P.,2011op.cit.,pp.11.
  • Nam S.P.,2011,“A Study Characteristic ofby using Electronic Expansion Valve and Hot Gas Bypass”, Master’s Thesis, UniversityofSeoul.
  • M.Wilatzen,N.B.O.L.Pettit,L.PlougSorensen,1998,“A general dynamic simulation model for evaporators and condensers in refrigeration”,Part2:Simulation and controlofand evaporator, InternationalJournalofRefrigeration,Vol.21,No.5,pp.404-414.
  • M.Wilatzen,N.B.O.L.Pettit,L.PlougSorensen,1998,“A general dynamic simulation model for evaporators and condensers in refrigeration”,Part1:Moving-boundary formulation oftwo-phase flows with heatexchange,InternationalJournalofRefrigeration, Vol.21,No.5,pp.398-403.
  • LiHua.,2008,“TheDecouplingControlofCapacityandSuperheat forVariableSpeed Refrigeration System”,Ph.D Thesis,Pukyong NationalUniversity.
  • L.A.Knobloch,C.R.SchenkandR.R.Crawford,1992,“Dynamic Modeling ofaMobileAirConditioning CompressorandCondenser forActualPerformanceData”,ACRC TR-12.
  • KISTI, 2009, “State of Art Technology in Semiconductor Equipment”,pp.1-36.
  • KISA 2009,“Semiconductor Equipment and Materials Industry StatusReport”,pp.1-10.
  • KIPO,2000,“Technology Trends in SemiconductorProcess and EquipmentIndustry”,IntellectualProperty 21 Vol.62,pp.136 - 149.
  • J.H.Darrand R.R.Crawford,“Modeling ofan AutomotiveAir Conditioning Compressor Bassed on ExperimentalData”,ACRC TR-14.
  • Im Y.J.2013,“Dynamic System ModelforRefrigeration Using ElectronicExpansionValve”,Master’sThesis,UniversityofSeoul.
  • Im Y.J.,2013op.cit.,pp.3.
  • Gene F. Franklin, 1995, Feedback control of Dynaic systems,thirded.,Addison-Wesley,New York,pp.168-223.
  • ChaD.A.,2014op.cit.,pp.15.
  • ChaD.A.,2014op.cit.,pp.11.
  • ChaD.A.,2014,op.cit.,pp.9.
  • ChaD.A.,2014,op.cit.,pp.10.
  • Cha D.A.,Kwon O.K.and Oh M.D.,2014,“An Experimental Study on SemiconductorProcess Chillerusing the DigitalScroll Compressor”,JournalofMechanicalScienceand Technology,Vol. 28,No.8.
  • Cha D.A.,Kwon O.K.,and Oh M.D.,2010,“An Experimental Study on ProcessChillerforSemiconductorTemperatureControl”, Trans.oftheKSME (B)Vol.35,No.5,pp.459-465.
  • Cha D.A.,Kwon O.K.,Yun J.H.,and Kim D.Y.,2010,“An ExperimentalStudy on Semi-conductorProcessChillerforEnergy Saving”,Proceeding oftheKSME Spring AnnualConference,pp. 371-376.
  • Cha D.A.,Kwon O.K.,2010,“An Study on Semiconductor ProcessChillerwith Variation ofControlMethods”,Proceeding of theKSME AutumnAnnualConference,pp.2632-2637.
  • Cha D. A., 2014, “A Study on Design and Operation Characteristics forSemiconductorProcess Chiller”,Ph.D Thesis, UniversityofSeoul,pp.2.
  • A.Outtagarts,P.Haberschill,M.Lallemand,1997,“Thetransient response of an evaporator fed through an electric expansion valve”,International Journal of Energy Research,Vol. 21,pp. 793-807.