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In-situ Synchrotron Radiation Photoemission Spectroscopy Study of Property Variation of Ta₂O5 Film during the Atomic Layer Deposition
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Cheolho Jeon
Soo Jeong Park
Seung Youb Lee
Seok Hwan Kim
Ki-Seok An
Jouhahn Lee
Hyung Joong Yun
Chong-Yun Park
한국진공학회[2014]
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